Ion implantation techniques - lectures given at the International ion implantation school, in connection with the fourth International conference on ion implantation: equipment and techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
- Författare
- International conference on ion implantation: equipment and techniques 1982) Berchtesgaden : H. ($r1939-) Glawischnig H. Ryssel International ion implantation school 1982) (Berchtesgaden :
- (Ed.: H. Ryssel and H. Glawischnig.)
- Genre
- Konferenser, Ej skönlitteratur, Bibliografi, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Springer | 1982 | Tyskland, Berlin, New York | 372 sidor. diagr., ill., tab. |